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Title: Frequency Tuning of In-Plane Comb Drive MEMS Resonators Due to VO 2 Phase Transition
Award ID(s):
1854750
PAR ID:
10417635
Author(s) / Creator(s):
; ; ; ; ;
Date Published:
Journal Name:
Journal of Microelectromechanical Systems
Volume:
32
Issue:
2
ISSN:
1057-7157
Page Range / eLocation ID:
151 to 153
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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