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The refractory metal iridium has many applications in high performance optical devices due to its high reflectivity into X-ray frequencies, low oxidation rate, and high melting point. Depositing Ir via magnetron sputtering produces high quality thin films, but the chamber pressure and sputter conditions can change Ir film microstructure on the nanoscale. Film microstructure is commonly examined through microscopy of film cross-sections, which is both a destructive characterization method and time consuming. In this work, we have utilized a non-destructive characterization technique, spectroscopic ellipsometry, to correlate the optical properties of the metal films with their structural morphologies, enabling large-scale inspection of optical components or the ability to customize the metal refractive index for the application at hand. The optical properties of Ir thin films deposited at chamber pressures from 10 mTorr to 25 mTorr are reported and compared to microscopy and resistivity results. The measurements were conducted with films deposited both on a bare wafer and on a titanium sublayer.
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High-temperature electrical and optical properties of sputtered iridium at wavelengths of 300 nm to 15 µm
Due to its refractory properties and higher oxidation resistance, iridium (Ir) exhibits great potential for applications such as thermophotovoltaic emitters or contamination sensing. However, the lack of its temperature-dependent optical data prevents accurate modeling of Ir-based optical devices operating at higher temperatures. In this work, refractive indices of as-deposited and annealed Ir films, sputter-deposited, are characterized at between room temperature and 550°C over 300 nm to 15 µm of wavelength. The extinction coefficients of both as-deposited and annealed Ir films tend to decrease as temperature increases, with the exception of as-deposited Ir at 550°C due to significant grain growth. Under 530°C, optical constants of as-deposited Ir are less sensitive to temperature than those of annealed Ir. These characteristics of Ir films are correlated with their microstructural changes.
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- Award ID(s):
- 2120581
- PAR ID:
- 10431332
- Publisher / Repository:
- Optical Society of America
- Date Published:
- Journal Name:
- Optical Materials Express
- Volume:
- 13
- Issue:
- 8
- ISSN:
- 2159-3930
- Format(s):
- Medium: X Size: Article No. 2227
- Size(s):
- Article No. 2227
- Sponsoring Org:
- National Science Foundation
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