Design Considerations for Controlling Silicon Nanoparticle Nucleation and Growth in a Nonthermal Plasma
- Award ID(s):
- 2009219
- PAR ID:
- 10432013
- Date Published:
- Journal Name:
- Plasma Chemistry and Plasma Processing
- Volume:
- 43
- Issue:
- 1
- ISSN:
- 0272-4324
- Page Range / eLocation ID:
- 225 to 245
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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