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Optical metasurfaces provide solutions to label-free biochemical sensing by localizing light resonantly beyond the diffraction limit, thereby selectively enhancing light–matter interactions for improved analytical performance. However, high-Qresonances in metasurfaces are usually achieved in the reflection mode, which impedes metasurface integration into compact imaging systems. Here, we demonstrate a metasurface platform for advanced biochemical sensing based on the physics of the bound states in the continuum (BIC) and electromagnetically induced transparency (EIT) modes, which arise when two interfering resonances from a periodic pattern of tilted elliptic holes overlap both spectrally and spatially, creating a narrow transparency window in the mid-infrared spectrum. We experimentally measure these resonant peaks observed in transmission mode (Q∼734 atλ∼8.8µm) in free-standing silicon membranes and confirm their tunability through geometric scaling. We also demonstrate the strong coupling of the BIC-EIT modes with a thinly coated PMMA film on the metasurface, characterized by a large Rabi splitting (32cm−1) and biosensing of protein monolayers in transmission mode. Our new photonic platform can facilitate the integration of metasurface biochemical sensors into compact and monolithic optical systems while being compatible with scalable manufacturing, thereby clearing the way for on-site biochemical sensing in everyday applications.
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Slot driven dielectric electromagnetically induced transparency metasurface
The control of resonant metasurface for electromagnetically induced transparency (EIT) offers unprecedented opportunities to tailor lightwave coupling at the nanoscale leading to many important applications including slow light devices, optical filters, chemical and biosensors. However, the realization of EIT relies on the high degree of structural asymmetry by positional displacement of optically resonant structures, which usually lead to low quality factor (Q-factor) responses due to the light leakage from structural discontinuity from asymmetric displacements. In this work, we demonstrate a new pathway to create high quality EIT metasurface without any displacement of constituent resonator elements. The mechanism is based on the detuning of the resonator modes which generate dark-bright mode interference by simply introducing a slot in metasurface unit cells (meta-atoms). More importantly, the slot diameter and position on the meta-atom can be modulated to tune the transmittance and quality factor (Q-factor) of the metasurface, leading to a Q-factor of 1190 and near unity transmission at the same time. Our work provides a new degree of freedom in designing optically resonant elements for metamaterials and metasurfaces with tailored wave propagation and properties.
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- Award ID(s):
- 2227650
- PAR ID:
- 10437533
- Publisher / Repository:
- Optical Society of America
- Date Published:
- Journal Name:
- Optics Express
- Volume:
- 31
- Issue:
- 17
- ISSN:
- 1094-4087; OPEXFF
- Format(s):
- Medium: X Size: Article No. 27324
- Size(s):
- Article No. 27324
- Sponsoring Org:
- National Science Foundation
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