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Phase pure PbZr 0.52 Ti 0.48 O 3 (PZT) films with up to 13 mol. % Nb were prepared on Pt-coated Si substrates using chemical solution deposition; charge compensation for Nb was accomplished by reducing the concentration of lead in the film. For high Nb doping levels, (1) superoxidation of the PZT film surface makes the PZT/Pt interface more p-type and, hence reduces electron injection over the Schottky barrier, (2) the bulk charge transport mechanism changes from electron trapping by Ti 4+ to hole migration between lead vacancies, and (3) the ionic conductivity due to migration of oxygen vacancies decreases. For [Formula: see text] Nb, electrical degradation was controlled via field-induced accumulation of oxygen vacancies near the cathode, which, in turn, leads to Schottky barrier lowering and electron trapping by Ti 4+ . In phase pure 13 mol. % Nb doped PZT films, on the other hand, the increase in the leakage current during electrical degradation was dominated by hole migration between lead vacancies ([Formula: see text]. A much lower lifetime and drastic increase in the leakage current upon electrical degradation was observed in mixed phase PNZT films, which was attributed to (1) a more electrically conductive pyrochlore phase and (2) a high concentration of lead vacancies.
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Cracking behavior in lead zirconate titanate films with different Zr/Ti ratios
Crack initiation stresses for different lead zirconate titanate (PZT) film compositions were investigated. PZT/Pt/TiO2/SiO2/Si stacks with 2.0 μm thick {100} oriented PZT films at the morphotropic phase boundary (MPB) showed a characteristic strength of 1137 MPa, and the film thickness served as the limiting flaw size for failure of the film/substrate stack. In contrast, for Zr/Ti ratios of 40/60 and 30/70, the characteristic stack strength increased while the Weibull modulus decreased to values typical for that of Si. This difference is believed to be due to toughening from ferroelasticity or phase switching. X-ray diffraction showed that the volume fraction of c-domains increased in Ti-rich compositions. This would allow for more switching from c to a-domains under biaxial tensile stress. Zr/Ti concentration gradients were present for all compositions, which contributed to the observation of a rhombohedral phase off the MPB. Due to the reduced tendency toward cracking, off-MPB compositions are potentially of interest in actuators, albeit with the trade-off of needing a high actuation voltage.
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- Award ID(s):
- 1841453
- PAR ID:
- 10439896
- Publisher / Repository:
- American Institute of Physics
- Date Published:
- Journal Name:
- Applied Physics Letters
- Volume:
- 121
- Issue:
- 16
- ISSN:
- 0003-6951
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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