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Title: Spatially selective, solid state etching of diamond using lithographically patterned FeCoB
Award ID(s):
1921842
PAR ID:
10440860
Author(s) / Creator(s):
;
Date Published:
Journal Name:
Diamond and Related Materials
Volume:
121
Issue:
C
ISSN:
0925-9635
Page Range / eLocation ID:
108763
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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