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Cavities fabricated on the microscale have a wide variety of applications, from microwells for cell cultures, microfluidic channels for drug delivery systems to waveguide structures for RF applications. Micro-cavities are particularly useful for sensing applications, such as cavity-based pressure sensors and gap-based capacitive sensors. Cavity structures have been widely demonstrated in MEMS devices using typical semiconductor processing. However, the development of similar structures for flexible applications poses additional challenges. While flexible cavity structures have been fabricated in laboratory environments, challenges arise when these structures are integrated into a larger flexible sensing device or flexible hybrid electronics system. An additive manufacturing approach to cavity formation is presented which utilizes a 3D screen-printing process and in-situ cure. Patterned micro-structures are formed by building up layers of dielectric ink interspersed as needed with printed conductive traces. A proof-of-concept microfluidic channel-based capacitor is fabricated to demonstrate the potential sensing applications for the fabricated microcavities.
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Micromechanical valve-operated needle-on-a-chip microinjection module for microfluidic large-scale integration
Abstract Microinjection is an essential process in genetic engineering that is used to deliver genetic materials into various biological specimens. Considering the high-throughput requirement for microinjection applications ranging from gene editing to cell therapies, there is a need for an automated, highly parallelized, reproducible, and easy-to-use microinjection strategy. Here we report an on-chip, microfluidic microinjection module designed for compatibility with microfluidic large-scale integration technology that can be fabricated via standard, multilayer soft lithography techniques. The needle-on-chip (NOC) module consists of a two-layer polydimethylsiloxane-based microfluidic module whose puncture and injection operations are reliant solely on Quake valve actuation. As a proof-of-concept, we designed a NOC module to conduct the microinjection of a common genetics model organism, Caenorhabditis elegans ( C. elegans ). The NOC design was analyzed using finite element method simulations for a large range of practically viable geometrical parameters. The computational results suggested that a slight lateral offset (>10 μ m) of the control channel is sufficient for a successful NOC operation with a large fabrication tolerance (50 μ m, 50% channel width). To demonstrate proof-of-concept, the microinjection platform was fabricated and utilized to perform a successful injection of a tracer dye into C. elegans .
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- Award ID(s):
- 2045087
- PAR ID:
- 10442726
- Date Published:
- Journal Name:
- Journal of Micromechanics and Microengineering
- Volume:
- 32
- Issue:
- 12
- ISSN:
- 0960-1317
- Page Range / eLocation ID:
- 125002
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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- Free Publicly Accessible Full Text
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Accepted Manuscript1.0
- Journal Article:
- https://doi.org/10.1088/1361-6439/ac984a
