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Title: Fabrication of 3D Screen-Printed Micro-Cavities Towards Sweat Sensors for Integrated Flexible Hybrid Electronics
Cavities fabricated on the microscale have a wide variety of applications, from microwells for cell cultures, microfluidic channels for drug delivery systems to waveguide structures for RF applications. Micro-cavities are particularly useful for sensing applications, such as cavity-based pressure sensors and gap-based capacitive sensors. Cavity structures have been widely demonstrated in MEMS devices using typical semiconductor processing. However, the development of similar structures for flexible applications poses additional challenges. While flexible cavity structures have been fabricated in laboratory environments, challenges arise when these structures are integrated into a larger flexible sensing device or flexible hybrid electronics system. An additive manufacturing approach to cavity formation is presented which utilizes a 3D screen-printing process and in-situ cure. Patterned micro-structures are formed by building up layers of dielectric ink interspersed as needed with printed conductive traces. A proof-of-concept microfluidic channel-based capacitor is fabricated to demonstrate the potential sensing applications for the fabricated microcavities.  more » « less
Award ID(s):
1939009
PAR ID:
10570112
Author(s) / Creator(s):
; ; ; ;
Publisher / Repository:
IEEE
Date Published:
ISSN:
2168-9229
ISBN:
979-8-3503-6351-7
Page Range / eLocation ID:
1 to 4
Format(s):
Medium: X
Location:
Kobe, Japan
Sponsoring Org:
National Science Foundation
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