The intrinsic and doped amorphous silicon layers in silicon heterojunction solar cells parasitically absorb light in the short wavelength region of the solar spectrum, lowering the generation current available to the device. Herein, a promising alternative to the hole‐selective amorphous silicon contact layers using only wide bandgap, transparent oxide materials is presented. Using thermal atomic layer deposition, a 1 nm hydrogenated aluminum oxide layer is deposited followed by a 4 nm molybdenum oxide layer on n‐type crystalline silicon. This contact stack provides an effective carrier lifetime of 1.14 ms. It is shown that the molybdenum oxide layer is successfully deposited with a high work function, which facilitates efficient hole extraction and repels majority carriers from the c‐Si surface. Then the implied open‐circuit voltage, saturation current density, and contact resistivity are recorded as a function of contact annealing temperature and show that they are relatively stable up to 200 °C.
Molybdenum oxide thin films are successfully deposited using spatial atomic layer deposition (SALD), a tool designed for high‐throughput industrial film growth. The structural and optical properties of the film are evaluated using ultraviolet photoelectron spectroscopy, high‐resolution transmission electron microscopy, and spectroscopic ellipsometry. To demonstrate the applicability of molybdenum oxide in industrial settings the films are applied as hole‐selective silicon heterojunction contacts for solar cells. When paired with intrinsic amorphous silicon passivation layers, implied open‐circuit voltages of 699 mV are achieved. The carrier transport is unaffected by low‐temperature contact anneals up to 300 °C with contact resistivities of ≈ 10 mΩ cm2. Finally, the optical performance of silicon solar cells featuring different front hole‐selective heterojunction structures are simulated. It is shown that the generation current density of heterojunction solar cells can be significantly increased with the addition of SALD molybdenum oxide contacts.
more » « less- NSF-PAR ID:
- 10455079
- Publisher / Repository:
- Wiley Blackwell (John Wiley & Sons)
- Date Published:
- Journal Name:
- Advanced Materials Interfaces
- Volume:
- 7
- Issue:
- 22
- ISSN:
- 2196-7350
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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