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Abstract As an alternative to traditional photolithography, printing processes are widely explored for the patterning of customizable devices. However, to date, the majority of high‐resolution printing processes for functional nanomaterials are additive in nature. To complement additive printing, there is a need for subtractive processes, where the printed ink results in material removal, rather than addition. In this study, a new subtractive patterning approach that uses electrohydrodynamic‐jet (e‐jet) printing of acid‐based inks to etch nanoscale zinc oxide (ZnO) thin films deposited using atomic layer deposition (ALD) is introduced. By tuning the printing parameters, the depth and linewidth of the subtracted features can be tuned, with a minimum linewidth of 11 µm and a tunable channel depth with ≈5 nm resolution. Furthermore, by tuning the ink composition, the volatility and viscosity of the ink can be adjusted, resulting in variable spreading and dissolution dynamics at the solution/film interface. In the future, acid‐based subtractive patterning using e‐jet printing can be used for rapid prototyping or customizable manufacturing of functional devices on a range of substrates with nanoscale precision.
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Electrohydrodynamic Jet Printing of 1D Photonic Crystals: Part II—Optical Design and Reflectance Characteristics
Abstract Additive manufacturing systems that can arbitrarily deposit multiple materials into precise, 3D spaces spanning the micro‐ to nanoscale are enabling novel structures with useful thermal, electrical, and optical properties. In this companion paper set, electrohydrodynamic jet (e‐jet) printing is investigated for its ability in depositing multimaterial, multilayer films with microscale spatial resolution and nanoscale thickness control, with a demonstration of this capability in creating 1D photonic crystals (1DPCs) with response near the visible regime. Transfer matrix simulations are used to evaluate different material classes for use in a printed 1DPC, and commercially available photopolymers with varying refractive indices (n= 1.35 to 1.70) are selected based on their relative high index contrast and fast curing times. E‐jet printing is then used to experimentally demonstrate pixelated 1DPCs with individual layer thicknesses between 80 and 200 nm, square pixels smaller than 40 µm across, with surface roughness less than 20 nm. The reflectance characteristics of the printed 1DPCs are measured using spatially selective microspectroscopy and correlated to the transfer matrix simulations. These results are an important step toward enabling cost‐effective, custom‐fabrication of advanced imaging devices or photonic crystal sensing platforms.
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- Award ID(s):
- 1727894
- PAR ID:
- 10455544
- Publisher / Repository:
- Wiley Blackwell (John Wiley & Sons)
- Date Published:
- Journal Name:
- Advanced Materials Technologies
- Volume:
- 5
- Issue:
- 10
- ISSN:
- 2365-709X
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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