We present a compact heterodyne laser interferometer developed for high-sensitivity displacement sensing applications. This interferometer consists of customized prisms and wave plates assembled as a quasi-monolithic unit to realize a miniaturized system. The interferometer design adopts a common-mode rejection scheme to provide a high rejection ratio to common environmental noise. Experimental tests in vacuum show a displacement sensitivity level of at and as low as above . The prototype unit is in size and weighs , allowing subsequent integration in compact systems.
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Fiber-based two-wavelength heterodyne laser interferometer
Displacement measuring interferometry is a crucial component in metrology applications. In this paper, we propose a fiber-based two-wavelength heterodyne interferometer as a compact and highly sensitive displacement sensor that can be used in inertial sensing applications. In the proposed design, two individual heterodyne interferometers are constructed using two different wavelengths, 1064 nm and 1055 nm; one of which measures the target displacement and the other monitors the common-mode noise in the fiber system. A narrow-bandwidth spectral filter separates the beam paths of the two interferometers, which are highly common and provide a high rejection ratio to the environmental noise. The preliminary test shows a sensitivity floor of at 1 Hz when tested in an enclosed chamber. We also investigated the effects of periodic errors due to imperfect spectral separation on the displacement measurement and propose algorithms to mitigate these effects.
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- Award ID(s):
- 2045579
- PAR ID:
- 10471075
- Publisher / Repository:
- Optica
- Date Published:
- Journal Name:
- Optics Express
- Volume:
- 30
- Issue:
- 21
- ISSN:
- 1094-4087
- Page Range / eLocation ID:
- 37993
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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