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Title: Quasi-monolithic heterodyne laser interferometer for inertial sensing
We present a compact heterodyne laser interferometer developed for high-sensitivity displacement sensing applications. This interferometer consists of customized prisms and wave plates assembled as a quasi-monolithic unit to realize a miniaturized system. The interferometer design adopts a common-mode rejection scheme to provide a high rejection ratio to common environmental noise. Experimental tests in vacuum show a displacement sensitivity level of 11 p m / H z at 100 m H z and as low as 0.6 p m / H z above 1 p m . The prototype unit is 20 m m ×<#comment/> 20 m m ×<#comment/> 10 m m in size and weighs 4.5 g , allowing subsequent integration in compact systems.  more » « less
Award ID(s):
2045579
PAR ID:
10471077
Author(s) / Creator(s):
;
Publisher / Repository:
Optica
Date Published:
Journal Name:
Optics Letters
Volume:
47
Issue:
19
ISSN:
0146-9592
Page Range / eLocation ID:
5120
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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