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Membrane-based cavity optomechanical systems have been widely successful; however, their chip-scale integration remains a significant challenge. Here we present a solution based on metasurface design. Specifically, by non-periodic photonic crystal patterning of a Si3N4membrane, we realize a suspended metamirror with a finite focal length, enabling formation of a stable optical cavity with a plane end-mirror. We present simulation, fabrication, and characterization of the metamirror using both free-space and cavity-based measurements, demonstrating reflectivities as high as 99% and cavity finesse as high as 600. The mirror radius of curvature (∼30cm) is inferred from the cavity mode spectrum. In combination with phononic engineering, focusing membrane mirrors offer a route towards high-cooperativity, vertically integrated cavity optomechanical systems with applications ranging from precision force sensing to hybrid quantum transduction.
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Degradation of Ta 2 O 5 / SiO 2 dielectric cavity mirrors in ultra-high vacuum
In order for optical cavities to enable strong light-matter interactions for quantum metrology, networking, and scalability in quantum computing systems, their mirrors must have minimal losses. However, high-finesse dielectric cavity mirrors can degrade in ultra-high vacuum (UHV), increasing the challenges of upgrading to cavity-coupled quantum systems. We observe the optical degradation of high-finesse dielectric optical cavity mirrors after high-temperature UHV bake in the form of a substantial increase in surface roughness. We provide an explanation of the degradation through atomic force microscopy (AFM), X-ray fluorescence (XRF), selective wet etching, and optical measurements. We find the degradation is explained by oxygen reduction in Ta2O5followed by growth of tantalum sub-oxide defects with height to width aspect ratios near ten. We discuss the dependence of mirror loss on surface roughness and finally give recommendations to avoid degradation to allow for quick adoption of cavity-coupled systems.
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- Award ID(s):
- 2317134
- PAR ID:
- 10473155
- Publisher / Repository:
- Optical Society of America
- Date Published:
- Journal Name:
- Optics Express
- Volume:
- 31
- Issue:
- 24
- ISSN:
- 1094-4087; OPEXFF
- Format(s):
- Medium: X Size: Article No. 39670
- Size(s):
- Article No. 39670
- Sponsoring Org:
- National Science Foundation
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