Even a relatively weak drive force is enough to push a typical nanomechanical resonator into the nonlinear regime. Consequently, nonlinearities are widespread in nanomechanics and determine the critical characteristics of nanoelectromechanical systems' (NEMSs) resonators. A thorough understanding of the nonlinear dynamics of higher eigenmodes of NEMS resonators would be beneficial for progress, given their use in applications and fundamental studies. Here, we characterize the nonlinearity and the linear dynamic range (LDR) of each eigenmode of two nanomechanical beam resonators with different intrinsic tension values up to eigenmode n = 11. We find that the modal Duffing constant increases as n4, while the critical amplitude for the onset of nonlinearity decreases as 1/n. The LDR, determined from the ratio of the critical amplitude to the thermal noise amplitude, increases weakly with n. Our findings are consistent with our theory treating the beam as a string, with the nonlinearity emerging from stretching at high amplitudes. These scaling laws, observed in experiments and validated theoretically, can be leveraged for pushing the limits of NEMS-based sensing even further.
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Nanoelectromechanical systems from two-dimensional materials
Micro- and nanoelectromechanical systems have numerous applications in sensing and signal transduction. Many properties benefit from reducing the system size to the nanoscale, such as increased responsivity, enhanced tunability, lower power consumption, and higher spatial density. Two-dimensional (2D) materials represent the ultimate limit of thickness, offering unprecedented new capabilities due to their natural nanoscale dimensions, high stability, high mechanical strength, and easy electronic integration. Here, we review the primary design principles, properties, applications, opportunities, and challenges of 2D materials as the building blocks of NEMS (2D NEMS) with a focus on nanomechanical resonators. First, we review the techniques used to design, fabricate, and transduce the motion of 2D NEMS. Then, we describe the dynamic behavior of 2D NEMS including vibrational eigenmodes, frequency, nonlinear behavior, and dissipation. We highlight the crucial features of 2D NEMS that enhance or expand the functionalities found in conventional NEMS, such as high tunability and rich nonlinear dynamics. Next, we overview the demonstrated applications of 2D NEMS as sensors and actuators, comparing their performance metrics to those of commercial MEMS. Finally, we provide a perspective on the future directions of 2D NEMS, such as hybrid quantum systems, integration of active 2D layers into nanomechanical devices, and low-friction interfaces in micromachines.
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- Award ID(s):
- 1846732
- PAR ID:
- 10488768
- Publisher / Repository:
- AIP publishing
- Date Published:
- Journal Name:
- Applied Physics Reviews
- Volume:
- 10
- Issue:
- 3
- ISSN:
- 1931-9401
- Page Range / eLocation ID:
- 031302
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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