When a gas is overvolted at or near atmospheric pressure, it results in a streamer discharge formation. Electrode geometries exert significant impact on the electrical breakdown of gases by altering the spatial profile of the electric field. In many applications the efficient generation of radicals is critical and is determined by the characteristics of the streamer discharge. We examine the effect of electrode geometry on the streamer characteristics and the production of radicals. This is performed for three different electrode geometries: plane–plane, pin–plane, and pin–pin. A two-dimensional rotationally symmetric fluid model is used for the streamer discharge simulation in the hydrogen/air gas mixture. The spatial profile of electron density and the electric field for point electrodes show significant differences when compared to plane electrodes. However, the efficiency of radical generation shows similar trends for the electrode configurations studied. We also present the results of spatial electrical energy density distribution which in turn determines spatial excited species distribution. These results can inform the design of specific applications.
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Low-pressure inductively coupled plasmas in hydrogen: impact of gas heating on the spatial distribution of atomic hydrogen and vibrationally excited states
Abstract Non-equilibrium inductively coupled plasmas (ICPs) operating in hydrogen are of significant interest for applications including large-area materials processing. Increasing control of spatial gas heating, which drives the formation of neutral species density gradients and the rate of gas-temperature-dependent reactions, is critical. In this study, we use 2D fluid-kinetic simulations with the Hybrid Plasma Equipment Model to investigate the spatially resolved production of atomic hydrogen in a low-pressure planar ICP operating in pure hydrogen (10–20 Pa or 0.075–0.15 Torr, 300 W). The reaction set incorporates self-consistent calculation of the spatially resolved gas temperature and 14 vibrationally excited states. We find that the formation of neutral-gas density gradients, which result from spatially non-uniform electrical power deposition at constant pressure, can drive significant variations in the vibrational distribution function and density of atomic hydrogen when gas heating is spatially resolved. This highlights the significance of spatial gas heating on the production of reactive species in relatively high-power-density plasma processing sources.
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- Award ID(s):
- 2009219
- PAR ID:
- 10489158
- Publisher / Repository:
- IOP Publishing
- Date Published:
- Journal Name:
- Plasma Sources Science and Technology
- Volume:
- 33
- Issue:
- 2
- ISSN:
- 0963-0252
- Format(s):
- Medium: X Size: Article No. 025002
- Size(s):
- Article No. 025002
- Sponsoring Org:
- National Science Foundation
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