Analysis of Silicon Nitride Trampoline Resonators for Ultrasensitive Infrared Detection

Liu, Yuncong; Watkins, Connor A.; Feng, Philip X.-L.

doi:10.1109/IPC57732.2023.10360553

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Citation Details

Analysis of Silicon Nitride Trampoline Resonators for Ultrasensitive Infrared Detection

Award ID(s):: 1939009

PAR ID:: 10495178

Author(s) / Creator(s):: Liu, Yuncong; Watkins, Connor A.; Feng, Philip X.-L.

Publisher / Repository:: IEEE

Date Published:: 2023-11-12

Journal Name:: 2023 IEEE Photonics Conference (IPC)

ISBN:: 979-8-3503-4722-7

Page Range / eLocation ID:: 1 to 2

Format(s):: Medium: X

Location:: Orlando, FL, USA

Sponsoring Org:: National Science Foundation

Free Publicly Accessible Full Text
Accepted Manuscript
Conference Paper:
https://doi.org/10.1109/IPC57732.2023.10360553

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