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Title: Semantic Autoencoder for Modeling BEOL and MOL Dielectric Lifetime Distributions
Award ID(s):
2137288 2137283 2137259 2345055
PAR ID:
10496001
Author(s) / Creator(s):
; ; ;
Publisher / Repository:
IEEE
Date Published:
Journal Name:
2023 IEEE International Reliability Physics Symposium (IRPS)
ISBN:
978-1-6654-5672-2
Page Range / eLocation ID:
1 to 9
Format(s):
Medium: X
Location:
Monterey, CA, USA
Sponsoring Org:
National Science Foundation
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