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The NSF Public Access Repository (PAR) system and access will be unavailable from 11:00 PM ET on Friday, May 16 until 2:00 AM ET on Saturday, May 17 due to maintenance. We apologize for the inconvenience.


This content will become publicly available on May 22, 2025

Title: Annealing reduces Si3N4 microwave-frequency dielectric loss in superconducting resonators
Award ID(s):
2016244 1734006
PAR ID:
10509279
Author(s) / Creator(s):
; ; ; ; ; ; ; ; ; ; ; ;
Publisher / Repository:
American Physical Society
Date Published:
Journal Name:
Physical Review Applied
Volume:
21
Issue:
5
ISSN:
2331-7019; PRAHB2
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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