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Annealing reduces Si3N4 microwave-frequency dielectric loss in superconducting resonators
- PAR ID:
- 10509279
- Publisher / Repository:
- American Physical Society
- Date Published:
- Journal Name:
- Physical Review Applied
- Volume:
- 21
- Issue:
- 5
- ISSN:
- 2331-7019; PRAHB2
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation