Chemical, Structural, and Electrical Changes in Molecular Layer-Deposited Hafnicone Thin Films after Thermal Processing
- Award ID(s):
- 2318576
- PAR ID:
- 10518616
- Publisher / Repository:
- American Chemical Society
- Date Published:
- Journal Name:
- ACS Applied Electronic Materials
- Volume:
- 6
- Issue:
- 7
- ISSN:
- 2637-6113
- Format(s):
- Medium: X Size: p. 5173-5182
- Size(s):
- p. 5173-5182
- Sponsoring Org:
- National Science Foundation
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