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Abstract Low propagation loss in high confinement waveguides is critical for chip‐based nonlinear photonics applications. Sophisticated fabrication processes which yield sub‐nm roughness are generally needed to reduce scattering points at the waveguide interfaces to achieve ultralow propagation loss. Here, ultralow propagation loss is shown by shaping the mode using a highly multimode structure to reduce its overlap with the waveguide interfaces, thus relaxing the fabrication processing requirements. Microresonators with intrinsic quality factors (Q) of 31.8 ± 4.4 million are experimentally demonstrated. Although the microresonators support ten transverse modes only the fundamental mode is excited and no higher order modes are observed when using nonlinear adiabatic bends. A record‐low threshold pump power of 73 µW for parametric oscillation is measured and a broadband, almost octave spanning single‐soliton frequency comb without any signatures of higher order modes in the spectrum spanning from 1097 to 2040 nm (126 THz) is generated in the multimode microresonator. This work provides a design method that can be applied to different material platforms to achieve and use ultrahigh‐Qmultimode microresonators.
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Twenty-nine million intrinsic Q -factor monolithic microresonators on thin-film lithium niobate
The recent emergence of thin-film lithium niobate (TFLN) has extended the landscape of integrated photonics. This has been enabled by the commercialization of TFLN wafers and advanced nanofabrication of TFLN such as high-quality dry etching. However, fabrication imperfections still limit the propagation loss to a few dB/m, restricting the impact of this platform. Here, we demonstrate TFLN microresonators with a record-high intrinsic quality (Q) factor of twenty-nine million, corresponding to an ultra-low propagation loss of 1.3 dB/m. We present spectral analysis and the statistical distribution ofQfactors across different resonator geometries. Our work pushes the fabrication limits of TFLN photonics to achieve aQfactor within 1 order of magnitude of the material limit.
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- Award ID(s):
- 2137723
- PAR ID:
- 10526280
- Publisher / Repository:
- Optical Society of America
- Date Published:
- Journal Name:
- Photonics Research
- Volume:
- 12
- Issue:
- 8
- ISSN:
- 2327-9125
- Format(s):
- Medium: X Size: Article No. A63
- Size(s):
- Article No. A63
- Sponsoring Org:
- National Science Foundation
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