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Title: Gallium Nitride (GaN) MEMS Lamb Wave Resonators Operating At High Temperature Up To 800°C
Award ID(s):
2221881
PAR ID:
10528924
Author(s) / Creator(s):
; ;
Publisher / Repository:
IEEE
Date Published:
ISBN:
979-8-3503-5792-9
Page Range / eLocation ID:
638 to 641
Format(s):
Medium: X
Location:
Austin, TX, USA
Sponsoring Org:
National Science Foundation
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