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We experimentally demonstrate slow light photonic crystal waveguide (PCW) and subwavelength waveguide (SWWG) loop terminated Mach-Zehnder interferometer (LT-MZI) sensors in a foundry-fabricated silicon-on-insulator (SOI) platform. We compare the experimental results on sensitivity and limit of detection (LOD) on the interferometer sensors with microcavity-type sensors. We show experimentally that 2-D PCW interferometers have higher phase sensitivities than SWWGs of the same length. Based on experimental results, 20- μ m-long 2-D PCW LT-MZI sensors and 200- μ m-long SWWG LT-MZI sensors achieve an LOD of 3.4×10−4 and 2.3×10−4 RIU, respectively, with nearly the same insertion losses in foundry-fabricated devices. We show that by considering the various sources of loss in our benchtop fiber-to-fiber photonic integrated circuit measurement system, it will be possible to reach 10−7 LOD in both slow light PCW and SWWG-based LT-MZI sensors with on-chip integrated light sources and detectors. We show via simulations and experiment that the LOD of a 20- μ m-long slow light PCW LT-MZI is equivalent to that of a 100- μ m-long SWWG LT-MZI, thus enabling more compact LT_MZI sensors when using slow light PCWs versus SWWGs
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Compact interferometer devices for chip-based chem-bio sensing
Changes in the real and imaginary parts of the waveguide effective index in the presence of analytes have been used in various microcavity and slow light devices for on-chip sensing and absorption spectroscopy respectively in diverse applications. Periodically patterned waveguide sensors in interferometer configurations can lead to small interferometer sizes comparable in dimensions to microcavity resonator sensors, and/or significantly higher sensitivities compared to resonator type sensors. We show our work with compact silicon photonic interferometer devices for on-chip biosensing and absorbance sensing, overcoming fabrication tolerances with post-fabrication phase trimming.
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- Award ID(s):
- 2210707
- PAR ID:
- 10529645
- Editor(s):
- Miller, Benjamin L; Weiss, Sharon M; Danielli, Amos
- Publisher / Repository:
- SPIE
- Date Published:
- ISBN:
- 9781510678583
- Page Range / eLocation ID:
- 4
- Format(s):
- Medium: X
- Location:
- San Francisco, United States
- Sponsoring Org:
- National Science Foundation
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- Free Publicly Accessible Full Text
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Accepted Manuscript1.0
- Conference Paper:
- https://doi.org/10.1117/12.3002996
