The structural flexibility of industrial robot arms makes them vibrate when they are commanded to move at fast operation speeds. Among the control strategies, feedforward control stands out as an interesting approach to suppress vibration since it does not create stability issues and works for repeating and non-repeating tasks. Currently, the state-of-the-art feedforward controller dedicated to suppressing residual vibration in robot arms is time-varying input shaping (TVIP). However, TVIP falls short in trajectory tracking tasks since the method adds delays in the commands creating errors in tracking and thereby contouring trajectories. Therefore, this paper proposes the use of an alternate feedforward method, known as the filtered B-splines (FBS) approach, to suppress vibration in six DOF robots while maintaining tracking accuracy. Since time-varying FBS (TVFBS) requires full frequency response functions (FRFs), compared to only natural frequencies and damping ratios for TVIP, we propose a framework for estimating the FRFs of serial kinematic chain 6-degree-of-freedom robots. Residual vibration reduction experiments and trajectory tracking experiments, in which the dynamics of a UR5e collaborative robot change considerably, were carried out to validate the model prediction framework. TVFBS reduced the end-effector vibration by 87% while improving tracking performance in both the y (22%) and z (29%) directions. On the other hand, TVIP worsened the tracking performance (-683.43% for the y and -662.37% for the z direction) despite the excellent vibration reduction (98%). Hence, TVFBS demonstrated significantly better tracking performance than TVIP while retaining comparable vibration reduction.
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A Preliminary Investigation of Input Shaping to Reduce the Residual Vibration of a Wafer-Handling Robot
Frog-leg robots are widely used for wafer-handling in semiconductor manufacturing. A typical frog-leg robot uses a magnetic coupler to achieve contactless transmission of motion between its driving motors, which operate at atmospheric pressure, and its end effector (blade) which operates within a vacuum chamber. However, the magnetic coupler is a lowstiffness transmission element that induces residual vibration during fast motions of the robot. Excessive residual vibration can cause collisions between the fragile wafer carried by the robot and cassette, hence damaging the wafer. While this problem could be solved by slowing down the robot, it comes at the cost of reduced productivity, which is undesirable. Therefore, this paper reports a preliminary investigation into input shaping (a popular vibration compensation technique) as a tool to reduce residual vibration of a frog-leg robot during high-speed motions. Two types of motions of the robot are considered: rotation and extension. A standard input shaper is shown to be very effective for mitigating residual vibration caused by rotational motion but is much less effective for extensional motion. The rationale is that the resonance frequencies of the robot are constant during rotation but they vary significantly during extension, hence reducing the effectiveness of standard input shaping. This necessitates the use of more advanced input shapers that can handle varying resonance frequencies to mitigate residual vibration during extensional motion in future work.
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- Award ID(s):
- 2054715
- PAR ID:
- 10537874
- Publisher / Repository:
- American Society of Mechanical Engineers
- Date Published:
- ISSN:
- 978-0-7918-8810-0
- ISBN:
- 978-0-7918-8810-0
- Format(s):
- Medium: X
- Location:
- Knoxville, Tennessee, USA
- Sponsoring Org:
- National Science Foundation
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