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Frog-legged robots are commonly used for silicon wafer handling in semiconductor manufacturing. However, their precision, speed and versatility are limited by vibration which varies with their position in the workspace. This paper proposes a methodology for modelling the pose-dependent vibration of a frog-legged robot as a function of its changing inertia, and its experimentally-identified joint stiffness and damping. The model is used to design a feedforward tracking controller for compensating the pose-dependent vibration of the robot. In experiments, the proposed method yields 65–73% reduction in RMS tracking error compared to a baseline controller designed for specific poses of the robot.
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Vibration and Tracking Control of Industrial Robots: A Comparison between Time-Varying Filtered B-Splines and Input Shaping
The structural flexibility of industrial robot arms makes them vibrate when they are commanded to move at fast operation speeds. Among the control strategies, feedforward control stands out as an interesting approach to suppress vibration since it does not create stability issues and works for repeating and non-repeating tasks. Currently, the state-of-the-art feedforward controller dedicated to suppressing residual vibration in robot arms is time-varying input shaping (TVIP). However, TVIP falls short in trajectory tracking tasks since the method adds delays in the commands creating errors in tracking and thereby contouring trajectories. Therefore, this paper proposes the use of an alternate feedforward method, known as the filtered B-splines (FBS) approach, to suppress vibration in six DOF robots while maintaining tracking accuracy. Since time-varying FBS (TVFBS) requires full frequency response functions (FRFs), compared to only natural frequencies and damping ratios for TVIP, we propose a framework for estimating the FRFs of serial kinematic chain 6-degree-of-freedom robots. Residual vibration reduction experiments and trajectory tracking experiments, in which the dynamics of a UR5e collaborative robot change considerably, were carried out to validate the model prediction framework. TVFBS reduced the end-effector vibration by 87% while improving tracking performance in both the y (22%) and z (29%) directions. On the other hand, TVIP worsened the tracking performance (-683.43% for the y and -662.37% for the z direction) despite the excellent vibration reduction (98%). Hence, TVFBS demonstrated significantly better tracking performance than TVIP while retaining comparable vibration reduction.
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- Award ID(s):
- 2054715
- PAR ID:
- 10537852
- Publisher / Repository:
- IEEE
- Date Published:
- ISBN:
- 979-8-3503-5536-9
- Page Range / eLocation ID:
- 1132 to 1138
- Format(s):
- Medium: X
- Location:
- Boston, MA, USA
- Sponsoring Org:
- National Science Foundation
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- Free Publicly Accessible Full Text
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Accepted Manuscript1.0
- Conference Paper:
- https://doi.org/10.1109/AIM55361.2024.10637032
