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Title: Fabry-Perot Bragg grating nanoresonator with ultrahigh intrinsic Q based on low-loss silicon nitride
Photonic integrated circuits based on ultralow loss silicon nitride waveguides have shown significant promise for realizing high-performance optical systems in a compact and scalable form factor. For the first time, we have developed a Fabry-Perot Bragg grating nanoresonator based on silicon nitride on silicon dioxide platform with an ultra-high intrinsic quality factor of 19.3 million. By combining the introduction of tapered grating between cavity and periodic Bragg grating, increasing the width of cavity to multi-mode region and optimized annealing strategy for Si3N4film, the propagation loss is reduced to around 0.014 dB/cm. Fabry-Perot Bragg grating nanoresonator can be easily implemented in a simple straight waveguide occupying a minimal amount of space. Therefore, it is a key component to build a high performance photonic integrated circuit for many applications.  more » « less
Award ID(s):
2219760
PAR ID:
10541593
Author(s) / Creator(s):
; ;
Publisher / Repository:
Optica
Date Published:
Journal Name:
Optics Express
Volume:
31
Issue:
21
ISSN:
1094-4087
Page Range / eLocation ID:
34688
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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