Control noise is a limiting factor in the low-frequency performance of the Advanced Laser Interferometer Gravitational-Wave Observatory (LIGO). In this paper, we model the effects of using new sensors called Homodyne Quadrature Interferometers (HoQIs) to control the suspension resonances. We show that if we were to use HoQIs, instead of the standard shadow sensors, we could suppress resonance peaks up to tenfold more while simultaneously reducing the noise injected by the damping system. Through a cascade of effects, this will reduce the resonant cross-coupling of the suspensions, allow for improved stability for feed-forward control, and result in improved sensitivity of the detectors in the 10–20 Hz band. This analysis shows that improved local sensors, such as HoQIs, should be used in current and future detectors to improve low-frequency performance.
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Experimental Study of Spectrally Selective MEMS/Metasurface Infrared Detectors
This article reports a comprehensive statistical analysis of uncooled infrared (IR) detectors based on radiofrequency (RF) aluminum nitride (AlN) contour mode resonators (CMRs) integrated with spectrally selective IR metasurfaces. Moreover, it reports the lowest noise equivalent power (NEP) recorded from these types of devices (∼11 pW/√Hz). The metasurfaces are printed on top of the AlN resonator body to decouple mechanical, RF, and IR responses. Optical lithography is used to pattern the metasurfaces, allowing the fabrication of hundreds of spectrally-selective IR detectors with different sensing performance within the same chip. An automated characterization system is employed to quickly record parameters such as quality factor, noise, and responsivity. This approach allows to experimentally determine the geometrical dimensions of quasi-optimal IR detectors that exhibit NEP in the pW/√Hz range and responsivities in the Hz/nW range. Additionally, the detectors performance versus IR light is explored using different interrogation mechanisms, namely monitoring the CMR resonance frequency as well as the amplitude and phase of a RF signal that excites the device at resonance. The statistical analysis of hundreds of IR sensors reveals trends between parameters such quality factor and noise floor, and NEP and responsivity. These trends provide useful guidelines towards the development of quasi-optimal spectrally-selective IR sensors operating at room temperature.
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- Award ID(s):
- 2314932
- PAR ID:
- 10544770
- Publisher / Repository:
- IEEE
- Date Published:
- Journal Name:
- IEEE Sensors Journal
- Volume:
- 24
- Issue:
- 11
- ISSN:
- 1530-437X
- Page Range / eLocation ID:
- 17313 to 17323
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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