Xia, F, Peng, Y, Pala, S, Arakawa, R, Yue, W, Tsao, P, Chen, C_H, Liu, H, Teng, M, Park, J_H, and Lin, L. High-SPL and low-driving-voltage pMUTs by sputtered potassium sodium niobate. Retrieved from https://par.nsf.gov/biblio/10548657.

Xia, F, Peng, Y, Pala, S, Arakawa, R, Yue, W, Tsao, P, Chen, C_H, Liu, H, Teng, M, Park, J_H, & Lin, L. High-SPL and low-driving-voltage pMUTs by sputtered potassium sodium niobate. Retrieved from https://par.nsf.gov/biblio/10548657.

Xia, F, Peng, Y, Pala, S, Arakawa, R, Yue, W, Tsao, P, Chen, C_H, Liu, H, Teng, M, Park, J_H, and Lin, L. "High-SPL and low-driving-voltage pMUTs by sputtered potassium sodium niobate". Country unknown/Code not available: 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS). https://par.nsf.gov/biblio/10548657.

@article{osti_10548657,
place = {Country unknown/Code not available}, title = {High-SPL and low-driving-voltage pMUTs by sputtered potassium sodium niobate}, url = {https://par.nsf.gov/biblio/10548657}, abstractNote = {}, journal = {}, publisher = {2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)}, author = {Xia, F and Peng, Y and Pala, S and Arakawa, R and Yue, W and Tsao, P and Chen, C_H and Liu, H and Teng, M and Park, J_H and Lin, L}, }