Low mechanical loss and high refractive index in amorphous Ta2O5 films grown by magnetron sputtering
- PAR ID:
- 10551251
- Publisher / Repository:
- American Physical Society
- Date Published:
- Journal Name:
- Physical Review Materials
- Volume:
- 8
- Issue:
- 3
- ISSN:
- 2475-9953; PRMHAR
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation