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Title: Low mechanical loss and high refractive index in amorphous Ta2O5 films grown by magnetron sputtering
Award ID(s):
2309290 2011571 2011706 2309086
PAR ID:
10551251
Author(s) / Creator(s):
; ; ; ; ; ; ; ; ; ; ; ; ;
Publisher / Repository:
American Physical Society
Date Published:
Journal Name:
Physical Review Materials
Volume:
8
Issue:
3
ISSN:
2475-9953; PRMHAR
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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