skip to main content
US FlagAn official website of the United States government
dot gov icon
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
https lock icon
Secure .gov websites use HTTPS
A lock ( lock ) or https:// means you've safely connected to the .gov website. Share sensitive information only on official, secure websites.

Explore Research Products in the PAR
It may take a few hours for recently added research products to appear in PAR search results.


Title: Robust control of maximum photolithography overlay error in a pattern layer
Award ID(s):
2342505
PAR ID:
10557074
Author(s) / Creator(s):
; ;
Publisher / Repository:
CIRP Annals
Date Published:
Journal Name:
CIRP Annals
Volume:
72
Issue:
1
ISSN:
0007-8506
Page Range / eLocation ID:
429 to 432
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
More Like this
No document suggestions found
  • Citation Formats
  • MLA
  • APA
  • Chicago
  • BibTeX
  • Save / Share this Record
  • Send to Email