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Growing a thick high-quality epitaxial layer on the β-Ga2O3 substrate is crucial in commercializing β-Ga2O3 devices. Metal organic chemical vapor deposition (MOCVD) is also well-established for the large-scale commercial growth of β-Ga2O3 and related heterostructures. This paper presents a systematic study of the Schottky barrier diodes fabricated on two different Si-doped homoepitaxial β-Ga2O3 thin films grown on Sn-doped (001) and (010) β-Ga2O3 substrates by MOCVD. X-ray diffraction analysis of the MOCVD-grown sample, room temperature current density–voltage data for different Schottky diodes, and C–V measurements are presented. Diode characteristics, such as ideality factor, barrier height, specific on-resistance, and breakdown voltage, are studied. Temperature dependence (170–360 K) of the ideality factor, barrier height, and Poole–Frenkel reverse leakage mechanism are also analyzed from the J–V–T characteristics of the fabricated Schottky diodes.
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This content will become publicly available on December 14, 2025
Radiation resilience of β-Ga2O3 Schottky barrier diodes under high dose gamma radiation
A systematic investigation of the electrical characteristics of β-Ga2O3 Schottky barrier diodes (SBDs) has been conducted under high-dose 60Co gamma radiation, with total cumulative doses reaching up to 5 Mrad (Si). Initial exposure of the diodes to 1 Mrad resulted in a significant decrease in on-current and an increase in on-resistance compared to the pre-radiation condition, likely due to the generation of radiation-induced deep-level acceptor traps. However, upon exposure to higher gamma radiation doses of 3 and 5 Mrad, a partial recovery of the device performance occurred, attributed to a radiation annealing effect. Capacitance–voltage (C–V) measurements showed a decrease in net carrier concentration in the β-Ga2O3 drift layer, from ∼3.20 × 1016 to ∼3.05 × 1016 cm−3, after 5 Mrad irradiation. Temperature-dependent I–V characteristics showed that 5 Mrad irradiation leads to a reduction in both forward and reverse currents across all investigated temperatures ranging from 25 to 250 °C, accompanied by slight increases in on-resistance, ideality factors, and Schottky barrier heights. Additionally, a slight increase in reverse breakdown voltage was observed post-radiation. Overall, β-Ga2O3 SBDs exhibit high resilience to gamma irradiation, with performance degradation mitigated by radiation-induced self-recovery, highlighting its potential for radiation-hardened electronic applications in extreme environment.
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- Award ID(s):
- 2019749
- PAR ID:
- 10565427
- Publisher / Repository:
- AIP
- Date Published:
- Journal Name:
- Journal of Applied Physics
- Volume:
- 136
- Issue:
- 22
- ISSN:
- 0021-8979
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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