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Phase transitions in metastable α-, κ(ε)-, and γ-Ga2O3 films to thermodynamically stable β-Ga2O3 during annealing in air, N2, and vacuum have been systematically investigated via in situ high-temperature x-ray diffraction (HT-XRD) and scanning electron microscopy (SEM). These respective polymorphs exhibited thermal stability to ∼471–525 °C, ∼773–825 °C, and ∼490–575 °C before transforming into β-Ga2O3, across all tested ambient conditions. Particular crystallographic orientation relationships were observed before and after the phase transitions, i.e., (0001) α-Ga2O3 → (2¯01) β-Ga2O3, (001) κ(ε)-Ga2O3 → (310) and (2¯01) β-Ga2O3, and (100) γ-Ga2O3 → (100) β-Ga2O3. The phase transition of α-Ga2O3 to β-Ga2O3 resulted in catastrophic damage to the film and upheaval of the surface. The respective primary and possibly secondary causes of this damage are the +8.6% volume expansion and the dual displacive and reconstructive transformations that occur during this transition. The κ(ε)- and γ-Ga2O3 films converted to β-Ga2O3 via singular reconstructive transformations with small changes in volume and unchanged surface microstructures.
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This content will become publicly available on May 1, 2026
Perspective on comparative radiation hardness of Ga2O3 polymorphs
Gallium oxide (Ga2O3) exists in different polymorphic forms, including the trigonal (α), monoclinic (β), cubic (γ), and orthorhombic (κ) phases, each exhibiting distinct structural and electronic properties. Among these, β-Ga2O3 is the most thermodynamically stable and widely studied for high-power electronics applications due to its ability to be grown as high-quality bulk crystals. However, metastable phases such as α-, γ-, and κ-Ga2O3 offer unique properties, including wider bandgap or strong polarization and ferroelectric characteristics, making them attractive for specialized applications. This paper summarizes the radiation hardness of these polymorphs by analyzing the reported changes in minority carrier diffusion length (LD) and carrier removal rates under various irradiation conditions, including protons, neutrons, alpha particles, and gamma rays. β-Ga2O3 demonstrates high radiation tolerance with LD reductions correlated to the introduction of electron traps (E2*, E3, and E4) and gallium–oxygen vacancy complexes (VGa–VO). α-Ga2O3 exhibits slightly better radiation hardness similar to κ-Ga2O3, which also shows minimal LD changes postirradiation, likely due to suppressed defect migration. γ-Ga2O3 is the least thermodynamically stable, but surprisingly is not susceptible to radiation-induced damage, and is stabilized under Ga-deficient conditions. The study highlights the role of polymorph-specific defect dynamics, doping concentrations, and nonuniform electrical properties in determining radiation hardness. We also discuss the effect of radiation exposure on the use of NiO/Ga2O3 heterojunction rectifiers that provide superior electrical performance relative to Schottky rectifiers. The presence of NiO does change some aspects of the response to radiation. Alloying with Al2O3 further modulates the bandgap of Ga2O3 and defect behavior, offering potentially tunable radiation tolerance. These findings provide critical insights into the radiation response of Ga2O3 polymorphs, with implications for their use in aerospace and radiation-hardened power electronics. Future research should focus on direct comparisons of polymorphs under identical irradiation conditions, defect identification, and annealing strategies to enhance radiation tolerance.
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- Award ID(s):
- 2310285
- PAR ID:
- 10598912
- Publisher / Repository:
- AIP
- Date Published:
- Journal Name:
- Journal of Vacuum Science & Technology A
- Volume:
- 43
- Issue:
- 3
- ISSN:
- 0734-2101
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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