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We find the spatially averaged sputter yield Y¯ analytically for non-planar surfaces that have slowly varying surface heights h=h(x,y). To begin, nonlocal effects like redeposition of sputtered material and secondary sputtering are neglected. We show that the leading order corrections to Y¯ are proportional to the spatial averages of (∂h/∂x)2 and (∂h/∂y)2. The constants of proportionality can be written in terms of the first and second derivatives of the sputter yield of a flat surface with respect to the ion incidence angle θ. For a range of θ values, Y¯ is a decreasing function of the amplitude of the surface texture. We also determine how the contribution of redeposition to Y¯ depends on the amplitude and characteristic lateral length scale of the surface morphology. As a test of our theory and to quantify the roles of redeposition and secondary sputtering, we performed Monte Carlo simulations of sputtering from Si targets with sinusoidal surfaces by 1 keV Ar+ ions. The theory agrees remarkably well with our Monte Carlo simulations. Our simulations also lead to the notable result that atoms that are sputtered and then strike the surface can themselves cause significant sputtering.
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Absolute doubly differential angular sputtering yields for 20 keV Kr+ on polycrystalline Cu
We have measured the absolute doubly differential angular sputtering yield for 20 keV Kr+ impacting a polycrystalline Cu slab at an incidence angle of θi = 45° relative to the surface normal. Sputtered Cu atoms were captured using collectors mounted on a half dome above the sample, and the sputtering distribution was measured as a function of the sputtering polar, θs, and azimuthal, ϕs, angles. Absolute results of the sputtering yield were determined from the mass gain of each collector, the ion dose, and the solid angle subtended, after irradiation to a total fluence of ∼1 × 1018 ions/cm2. Our approach overcomes shortcomings of commonly used methods that only provide relative yields as a function of θs in the incidence plane (defined by the ion velocity and the surface normal). Our experimental results display an azimuthal variation that increases with increasing θs and is clearly discrepant with simulations using binary collision theory. We attribute the observed azimuthal anisotropy to ion-induced formation of micro- and nano-scale surface features that suppress the sputtering yield through shadowing and redeposition effects, neither of which are accounted for in the simulations. Our experimental results demonstrate the importance of doubly differential angular sputtering studies to probe ion sputtering processes at a fundamental level and to explore the effect of ion-beam-generated surface roughness.
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- Award ID(s):
- 2009365
- PAR ID:
- 10570986
- Publisher / Repository:
- AIP Publishing
- Date Published:
- Journal Name:
- Journal of Applied Physics
- Volume:
- 135
- Issue:
- 3
- ISSN:
- 0021-8979
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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- Free Publicly Accessible Full Text
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Accepted Manuscript1.0
- Journal Article:
- https://doi.org/10.1063/5.0184417
