We demonstrate simultaneous figuring and surface finishing of glass using a femtosecond laser. For the first time, to the best of our knowledge, we have achieved deterministic material removal with nanometer precision and maintained sub-nanometer surface roughness without inducing any mid-spatial-frequency errors to the initial surface. A dynamic pulse propagation model is established to predict the interaction process, including plasma generation and surface temperature. The interactive modeling and the experiments enable the selection of a set of laser parameters to achieve controllable optical figuring and finishing. This demonstration shows the potential for using femtosecond lasers for advanced freeform optic forming, finishing, and reduction of detrimental mid-spatial-frequency errors, and laser-ablation-based patterning used for fabrication of integrated photonics and lasers.
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Optical structuring and finishing toward mid-spatial-frequency error reduction using femtosecond lasers
We demonstrate nano-structuring and the reduction of mid-spatial-frequency errors using femtosecond laser figuring and finishing. For the first time, to the best of our knowledge, we have corrected mid-spatial-frequency errors from 17 nm to one nanometer in magnitude. We established a method for creating and predicting periodic nanostructures. This demonstration opens the path of using femtosecond lasers to correct surface errors that inherently result from sub-aperture manufacturing techniques.
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- PAR ID:
- 10572301
- Publisher / Repository:
- Optica Publishing Group
- Date Published:
- Journal Name:
- Optics Letters
- Volume:
- 49
- Issue:
- 6
- ISSN:
- 0146-9592
- Page Range / eLocation ID:
- 1560
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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