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The existing silicon-carbide-on-insulator photonic platform utilizes a thin layer of silicon dioxide under silicon carbide (SiC) to provide optical confinement and mode isolation. Here, we replace the underneath silicon dioxide layer with 1-µm-thick aluminum nitride and demonstrate a 4H-silicon-carbide-on-aluminum-nitride integrated photonic platform for the first time to our knowledge. Efficient grating couplers, low-loss waveguides, and compact microring resonators with intrinsic quality factors up to 210,000 are fabricated. In addition, by undercutting the aluminum nitride layer, the intrinsic quality factor of the silicon carbide microring is improved by nearly one order of magnitude (1.8 million). Finally, an optical pump–probe method is developed to measure the thermal conductivity of the aluminum nitride layer, which is estimated to be over 30 times of that of silicon dioxide.
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Reduction of thermal instability of soliton states in coupled Kerr-microresonators
Kerr-microresonator frequency combs in integrated photonics waveguides are promising technologies for next-generation positioning, navigation, and timing applications, with advantages that include platforms that are mass-producible and CMOS-compatible and spectra that are phase-coherent and octave-spanning. Fundamental thermal noise in the resonator material typically limits the timing and frequency stability of a microcomb. The small optical mode volume of the microresonators exaggerates this effect, as it both increases the magnitude and shortens the timescale of thermodynamic fluctuations. In this work, we investigate thermal instability in silicon nitride microring resonators as well as techniques for reducing their effects on the microcomb light. We characterize the time-dependent thermal response in silicon nitride microring resonators through experimental measurements and finite element method simulations. Through fast control of the pump laser frequency, we reduce thermal recoil due to heating. Finally, we demonstrate the utility of a coupled microresonator system with tunable mode interactions to increase the stability of a soliton against thermal shifts.
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- Award ID(s):
- 2340973
- PAR ID:
- 10586998
- Publisher / Repository:
- American Institute of Physics
- Date Published:
- Journal Name:
- APL Photonics
- Volume:
- 10
- Issue:
- 5
- ISSN:
- 2378-0967
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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