skip to main content
US FlagAn official website of the United States government
dot gov icon
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
https lock icon
Secure .gov websites use HTTPS
A lock ( lock ) or https:// means you've safely connected to the .gov website. Share sensitive information only on official, secure websites.


This content will become publicly available on April 1, 2026

Title: High-Temperature Electrical Characteristics of High-Voltage AlN Schottky Barrier Diodes on Single-Crystal AlN Substrates
Award ID(s):
2338604
PAR ID:
10589181
Author(s) / Creator(s):
; ; ; ; ;
Publisher / Repository:
IEEE
Date Published:
Journal Name:
IEEE Transactions on Electron Devices
Volume:
72
Issue:
4
ISSN:
0018-9383
Page Range / eLocation ID:
1637 to 1643
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
More Like this
  1. AlN Schottky barrier diodes with low ideality factor (<1.2), low differential ON-resistance (<0.6 mΩ cm2), high current density (>5 kA cm−2), and high breakdown voltage (680 V) are reported. The device structure consisted of a two-layer, quasi-vertical design with a lightly doped AlN drift layer and a highly doped Al0.75Ga0.25N ohmic contact layer grown on AlN substrates. A combination of simulation, current–voltage measurements, and impedance spectroscopy analysis revealed that the AlN/AlGaN interface introduces a parasitic electron barrier due to the conduction band offset between the two materials. This barrier was found to limit the forward current in fabricated diodes. Further, we show that introducing a compositionally-graded layer between the AlN and the AlGaN reduces the interfacial barrier and increases the forward current density of fabricated diodes by a factor of 104
    more » « less
  2. The recent demonstration of  W mm−1output power at 94 GHz in AlN/GaN/AlN high‐electron‐mobility transistors (HEMTs) has established AlN as a promising platform for millimeter‐wave electronics. The current state‐of‐art AlN HEMTs using ex situ‐deposited silicon nitride (SiN) passivation layers suffer from soft gain compression due to trapping of carriers by surface states. Reducing surface state dispersion in these devices is thus desired to access higher output powers. Herein, a potential solution using a novel in situ crystalline AlN passivation layer is provided. A thick, 30+ nm‐top AlN passivation layer moves the as‐grown surface away from the 2D electron gas (2DEG) channel and reduces its effect on the device. Through a series of metal‐polar AlN/GaN/AlN heterostructure growths, it is found that pseudomorphically strained 15 nm thin GaN channels are crucial to be able to grow thick AlN barriers without cracking. The fabricated recessed‐gate HEMTs on an optimized heterostructure with 50 nm AlN barrier layer and 15 nm GaN channel layer show reduction in dispersion down to compared with in current state‐of‐art ex situ SiN‐passivated HEMTs. These results demonstrate the efficacy of this unique in situ crystalline AlN passivation technique and should unlock higher mm‐wave powers in next‐generation AlN HEMTs. 
    more » « less
  3. Abstract This letter reports the demonstration and electrical characterization of high-voltage AlN metal-semiconductor field-effect transistors (MESFETs) on single-crystal AlN substrates. Compared with AlN MESFETs on foreign substrates, the AlN-on-AlN MESFETs showed high breakdown voltages of over 2 kV for drain-to-gate spacing of 15 μm and one of the highest average breakdown fields among reported AlN MESFETs. Additionally, the devices also exhibited decent drain saturation current and on/off ratio without complicated regrown or graded contact layers, which are several times higher than those of reported AlN-on-sapphire MESEFTs. This work is beneficial for the future development of ultrawide bandgap AlN power electronics. 
    more » « less
  4. Aluminum nitride (AlN) offers novel potential for electronic integration and performance benefits for high‐power, millimeter‐wave amplification. Herein, load‐pull power performance at 30 and 94 GHz for AlN/GaN/AlN high‐electron‐mobility transistors (HEMTs) on silicon carbide (SiC) is reported. When tuned for peak power‐added efficiency (PAE), the reported AlN/GaN/AlN HEMT shows PAE of 25% and 15%, with associated output power () of 2.5 and 1.7 W mm−1, at 30 and 94 GHz, respectively. At 94 GHz, the maximum generated is 2.2 W mm−1, with associated PAE of 13%. 
    more » « less