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There is increasing interest in the alpha polytype of Ga2O3 because of its even larger bandgap than the more studied beta polytype, but in common with the latter, there is no viable p-type doping technology. One option is to use p-type oxides to realize heterojunctions and NiO is one of the candidate oxides. The band alignment of sputtered NiO on α-Ga2O3 remains type II, staggered gap for annealing temperatures up to 600 °C, showing that this is a viable approach for hole injection in power electronic devices based on the alpha polytype of Ga2O3. The magnitude of both the conduction and valence band offsets increases with temperature up to 500 °C, but then is stable to 600 °C. For the as-deposited NiO/α-Ga2O3 heterojunction, ΔEV = −2.8 and ΔEC = 1.6 eV, while after 600 °C annealing the corresponding values are ΔEV = −4.4 and ΔEC = 3.02 eV. These values are 1−2 eV larger than for the NiO/β-Ga2O3 heterojunction.
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This content will become publicly available on July 1, 2026
Band alignment of Cr2MnO4 on (2¯01) and (001) β-Ga2O3
p-type Cr2MnO4 with bandgap 3.01 eV was sputter deposited onto (2¯01) and (001) n-type or semi-insulating β-Ga2O3.The heterojunction of p-type CrMnO4 on n-type Ga2O3 is found to be type II, staggered gap, i.e., the band offsets are such that both the conduction and valence band edges of Ga2O3 are lower in energy than those of the Cr2MnO4. This creates a staggered band alignment, which can facilitate the separation of photogenerated electron-hole pairs. The valence band edge of Cr2MnO4 is higher than that of Ga2O3 by 1.82–1.93 eV depending on substrate orientation and doping, which means that holes in Cr2MnO4 would have a lower energy barrier to overcome to move into Ga2O3. Conversely, the conduction band edge of Cr2MnO4 is higher than that of Ga2O3 by 0.13–0.30 eV depending on substrate doping and orientation, which would create a barrier for electrons in Ga2O3 to move into Cr2MnO4. This heterojunction looks highly promising for p-n junction formation for advanced Ga2O3-based power rectifiers.
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- PAR ID:
- 10595925
- Publisher / Repository:
- AVS
- Date Published:
- Journal Name:
- Journal of Vacuum Science & Technology A
- Volume:
- 43
- Issue:
- 4
- ISSN:
- 0734-2101
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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