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Title: Atomic Layer Deposition for Enhanced Light Confinement in Nonlinear Metasurfaces
Award ID(s):
2418519
PAR ID:
10596740
Author(s) / Creator(s):
;
Publisher / Repository:
American Chemical Society
Date Published:
Journal Name:
ACS Omega
Volume:
10
Issue:
22
ISSN:
2470-1343
Format(s):
Medium: X Size: p. 23150-23160
Size(s):
p. 23150-23160
Sponsoring Org:
National Science Foundation
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