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Influence of transition metal type and sputter deposition conditions on the hardness of transition metal carbide thin films
- PAR ID:
- 10633843
- Publisher / Repository:
- Elsevier
- Date Published:
- Journal Name:
- Journal of the European Ceramic Society
- Volume:
- 45
- Issue:
- 15
- ISSN:
- 0955-2219
- Page Range / eLocation ID:
- 117602
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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