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This content will become publicly available on July 14, 2026

Title: NANOSCALE CONTROL OF A FLEXURE-MOUNTED ATOMIC FORCE MICROSCOPE FOR MOVING SUBSTRATE METROLOGY
Award ID(s):
2229036
PAR ID:
10642917
Author(s) / Creator(s):
; ; ; ; ;
Publisher / Repository:
American Society for Precision Engineering
Date Published:
Format(s):
Medium: X
Location:
Berkeley, CA
Sponsoring Org:
National Science Foundation
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