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Parametric and theoretical study of hole quality in conventional micro-machining and rotary ultrasonic micro-machining of silicon
- Award ID(s):
- 2102181
- PAR ID:
- 10643337
- Publisher / Repository:
- ELSEVIER
- Date Published:
- Journal Name:
- Precision Engineering
- Volume:
- 93
- ISSN:
- 0141-6359
- Page Range / eLocation ID:
- 167-176
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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