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This content will become publicly available on January 10, 2026

Title: Parametric and theoretical study of hole quality in conventional micro-machining and rotary ultrasonic micro-machining of silicon
Award ID(s):
2102181
PAR ID:
10643337
Author(s) / Creator(s):
; ;
Publisher / Repository:
ELSEVIER
Date Published:
Journal Name:
Precision Engineering
Volume:
93
ISSN:
0141-6359
Page Range / eLocation ID:
167-176
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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