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51.3 GHz Overmoded Bulk Acoustic Resonator Using 35% Scandium Doped Aluminum Nitride
- Award ID(s):
- 2133388
- PAR ID:
- 10655747
- Publisher / Repository:
- IEEE
- Date Published:
- Journal Name:
- Journal of Microelectromechanical Systems
- Volume:
- 34
- Issue:
- 5
- ISSN:
- 1057-7157
- Page Range / eLocation ID:
- 538 to 547
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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