The existing silicon-carbide-on-insulator photonic platform utilizes a thin layer of silicon dioxide under silicon carbide (SiC) to provide optical confinement and mode isolation. Here, we replace the underneath silicon dioxide layer with 1-µm-thick aluminum nitride and demonstrate a 4H-silicon-carbide-on-aluminum-nitride integrated photonic platform for the first time to our knowledge. Efficient grating couplers, low-loss waveguides, and compact microring resonators with intrinsic quality factors up to 210,000 are fabricated. In addition, by undercutting the aluminum nitride layer, the intrinsic quality factor of the silicon carbide microring is improved by nearly one order of magnitude (1.8 million). Finally, an optical pump–probe method is developed to measure the thermal conductivity of the aluminum nitride layer, which is estimated to be over 30 times of that of silicon dioxide.
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4H-SiC microring opto-mechanical oscillator with a self-injection locked pump
We have demonstrated, for the first time to our knowledge, self-injection locking of a distributed feedback diode laser to a multimode 4H-silicon carbide (4H-SiC) microring resonator, which is also used for the observation of resonant opto-mechanical oscillation in the cavity modes. While the fundamental transverse-electric mode family of the silicon carbide microring was optically pumped, Stokes light was generated in the adjacent fundamental transverse-magnetic resonant mode. The threshold of the process did not exceed 5 mW of light entering the cavity characterized by a loaded optical quality factor of 2 × 10^6. These results mark a significant milestone in unlocking the potential of 4H-SiC through turnkey soliton microcomb generation and empowering future advancements in areas such as cavity optomechanics using this versatile and quantum-friendly material platform.
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- Award ID(s):
- 2131402
- PAR ID:
- 10655844
- Publisher / Repository:
- APL Photonics
- Date Published:
- Journal Name:
- APL Photonics
- Volume:
- 10
- Issue:
- 3
- ISSN:
- 2378-0967
- Format(s):
- Medium: X
- Sponsoring Org:
- National Science Foundation
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