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This content will become publicly available on June 10, 2026

Title: Synthesis, characterization, and thermal properties of volatile 1,4-dialkyl-5-silatetrazolines: nitrogen-rich silicon heterocycles as possible CVD precursors for silicon nitride
The synthesis and properties of three 1,4-dialkyl-5-silatetrazoline compounds (tBuNCHCHNtBu)Si(N4R2) are described, where R = Et,iPr, ortBu. These compounds may be useful as low temperature CVD precursors for silicon nitride thin films.  more » « less
Award ID(s):
2400099
PAR ID:
10656983
Author(s) / Creator(s):
 ;  
Publisher / Repository:
Royal Society of Chemistry
Date Published:
Journal Name:
Dalton Transactions
Volume:
54
Issue:
23
ISSN:
1477-9226
Page Range / eLocation ID:
9399 to 9404
Format(s):
Medium: X
Sponsoring Org:
National Science Foundation
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