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  1. During the past decade, metasurfaces have shown great potential to complement standard optics, providing novel pathways to control the phase, amplitude, and polarization of electromagnetic waves utilizing arrays of subwavelength resonators. We present dynamic surface wave (SW) switching at terahertz frequencies utilizing a mechanically reconfigurable metasurface. Our metasurface is based on a microelectromechanical system (MEMS) consisting of an array of micro-cantilever structures, enabling dynamic tuning between a plane wave (PW) and a SW for normal incidence terahertz radiation. This is realized using line-by-line voltage control of the cantilever displacements to achieve full-span (2π<#comment/>) phase control. Full-wave electromagnetic simulations and terahertz time-domain spectroscopy agree with coupled mode theory, which was employed to design the metasurface device. A conversion efficiency of nearly 60% has been achieved upon switching between the PW and SW configurations. Moreover, a nearly 100 GHz working bandwidth is demonstrated. The MEMS-based control modality we demonstrate can be used for numerous applications, including but not limited to terahertz multifunctional metasurface devices for spatial light modulation, dynamic beam steering, focusing, and beam combining, which are crucial for future “beyond 5G” communication systems.

     
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  2. Abstract

    Bound states in the continuum (BIC) is an exotic concept describing systems without radiative loss. BICs are widely investigated in optics due to numerous potential applications including lasing, sensing, and filtering, among others. This study introduces a structurally tunable BIC terahertz metamaterial fabricated using micromachining and experimentally characterized using terahertz time domain spectroscopy. Control of the bending angle of the metamaterial by thermal actuation modifies the capacitance enabling tuning from a quasi‐BIC state with a quality factor of 26 to the BIC state. The dynamic response from the quasi‐BIC state to the BIC state is achieved by blueshifting the resonant frequency of the LC mode while maintaining a constant resonant frequency for the dipole mode. Additional insight into the tunable electromagnetic response is obtained using temporal coupled mode theory (CMT). The results reveal the effectiveness of bi‐layer cantilever‐based structures to realize tunable BIC metamaterials with potential applications for nonlinear optics and light‐matter control at terahertz frequencies.

     
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  4. The concept of “bound states in the continuum” (BIC) describes an idealized physical system exhibiting zero radiative loss composed, for example, of an infinitely extended array of resonators. In principle, vanishing of radiative losses enables an infinitely high-quality factor and corresponding infinite lifetime of the resonance. As such, BIC inspired metasurfaces and photonic designs aim to achieve superior performance in various applications including sensing and lasing. We describe an analytical model based on temporal coupled mode theory to realize an “accidental” (i.e., parameter-tuned) Friedrich–Wintgen BIC. Further, we experimentally verify this model with measurements of quasi-BICs in a metallic terahertz metasurface (MS) and the corresponding complementary metasurface (CMS) using terahertz time domain spectroscopy. For the MS and CMS structures, quality factors of∼<#comment/>20are achieved, limited by non-radiative intrinsic loss in the materials. Our results reveal that Babinet’s principle qualitatively holds for the MS and CMS quasi-BIC structures. In addition, ultra-high electric and magnetic field enhancement MS and CMS structures, respectively, are presented.

     
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  5. Abstract

    Electromagnetic metamaterials, which are a major type of artificially engineered materials, have boosted the development of optical and photonic devices due to their unprecedented and controllable effective properties, including electric permittivity and magnetic permeability. Metamaterials consist of arrays of subwavelength unit cells, which are also known as meta-atoms. Importantly, the effective properties of metamaterials are mainly determined by the geometry of the constituting subwavelength unit cells rather than their chemical composition, enabling versatile designs of their electromagnetic properties. Recent research has mainly focused on reconfigurable, tunable, and nonlinear metamaterials towards the development of metamaterial devices, namely, metadevices, via integrating actuation mechanisms and quantum materials with meta-atoms. Microelectromechanical systems (MEMS), or microsystems, provide powerful platforms for the manipulation of the effective properties of metamaterials and the integration of abundant functions with metamaterials. In this review, we will introduce the fundamentals of metamaterials, approaches to integrate MEMS with metamaterials, functional metadevices from the synergy, and outlooks for metamaterial-enabled photonic devices.

     
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