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Agarwal, Akshay; Kasaei, Leila; He, Xinglin; Kitichotkul, Ruangrawee; Hitit, Oğuz Kağan; Peng, Minxu; Schultz, J Albert; Feldman, Leonard C; Goyal, Vivek K (, Proceedings of the National Academy of Sciences)Modern science is dependent on imaging on the nanoscale, often achieved through processes that detect secondary electrons created by a highly focused incident charged particle beam. Multiple types of measurement noise limit the ultimate trade-off between the image quality and the incident particle dose, which can preclude useful imaging of dose-sensitive samples. Existing methods to improve image quality do not fundamentally mitigate the noise sources. Furthermore, barriers to assigning a physically meaningful scale make the images qualitative. Here, we introduce ion count-aided microscopy (ICAM), which is a quantitative imaging technique that uses statistically principled estimation of the secondary electron yield. With a readily implemented change in data collection, ICAM substantially reduces source shot noise. In helium ion microscopy, we demonstrate 3 dose reduction and a good match between these empirical results and theoretical performance predictions. ICAM facilitates imaging of fragile samples and may make imaging with heavier particles more attractive.more » « less
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Kitichotkul, Ruangrawee; Rapp, Joshua; Goyal, Vivek K (, IEEE Journal of Selected Topics in Quantum Electronics)
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Peng, Minxu; Kitichotkul, Ruangrawee; Seidel, Sheila W.; Yu, Christopher; Goyal, Vivek K (, IEEE Transactions on Computational Imaging)
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