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Creators/Authors contains: "Smith, RJ L"

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  1. ; ; ; (, The 67th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication)
    To our knowledge, these are the first studies of molecules other than water for EBL in gaseous environments. Exposure of PMMA under helium yields higher sensitivity, contrast (12.5) and the highest resolution (25-nm half-pitch dense lines and spaces) demonstrated to date for EBL on insulating substrates in a gaseous environment. 
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    Accepted Manuscript Full Text Available