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Title: Enhanced contrast and high-resolution patterning of PMMA on insulating substrates under ambient gases
To our knowledge, these are the first studies of molecules other than water for EBL in gaseous environments. Exposure of PMMA under helium yields higher sensitivity, contrast (12.5) and the highest resolution (25-nm half-pitch dense lines and spaces) demonstrated to date for EBL on insulating substrates in a gaseous environment.  more » « less
Award ID(s):
2135666
PAR ID:
10588009
Author(s) / Creator(s):
; ; ;
Publisher / Repository:
The 67th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
Date Published:
Format(s):
Medium: X
Location:
La Jolla, CA
Sponsoring Org:
National Science Foundation
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