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The effect of an electric field on local domain structure near a 24° tilt grain boundary in a 200 nm-thick Pb(Zr_0.2Ti_0.8)O₃bi-crystal ferroelectric film was probed using synchrotron nanodiffraction. The bi-crystal film was grown epitaxially on SrRuO₃-coated (001) SrTiO₃24° tilt bi-crystal substrates. From the nanodiffraction data, real-space maps of the ferroelectric domain structure around the grain boundary prior to and during application of a 200 kV cm⁻¹electric field were reconstructed. In the vicinity of the tilt grain boundary, the distributions of densities ofc-type tetragonal domains with thecaxis aligned with the film normal were calculated on the basis of diffracted intensity ratios ofc- anda-type domains and reference powder diffraction data. Diffracted intensity was averaged along the grain boundary, and it was shown that the density ofc-type tetragonal domains dropped to ∼50% of that of the bulk of the film over a range ±150 nm from the grain boundary. This work complements previous results acquired by band excitation piezoresponse force microscopy, suggesting that reduced nonlinear piezoelectric response around grain boundaries may be related to the change in domain structure, as well as to the possibility of increased pinning of domain wall motion. The implications of the results and analysis in terms of understanding the role of grain boundaries in affecting the nonlinear piezoelectric and dielectric responses of ferroelectric materials are discussed. 

Lead zirconate titanate (PZT) thin films offer advantages in microelectromechanical systems (MEMSs) including large motion, lower drive voltage, and high energy densities. Depending on the application, different substrates are sometimes required. Self-heating occurs in the PZT MEMS due to the energy loss from domain wall motion, which can degrade the device performance and reliability. In this work, the self-heating of PZT thin films on Si and glass and a film released from a substrate were investigated to understand the effect of substrates on the device temperature rise. Nano-particle assisted Raman thermometry was employed to quantify the operational temperature rise of these PZT actuators. The results were validated using a finite element thermal model, where the volumetric heat generation was experimentally determined from the hysteresis loss. While the volumetric heat generation of the PZT films on different substrates was similar, the PZT films on the Si substrate showed a minimal temperature rise due to the effective heat dissipation through the high thermal conductivity substrate. The temperature rise on the released structure is 6.8× higher than that on the glass substrates due to the absence of vertical heat dissipation. The experimental and modeling results show that the thin layer of residual Si remaining after etching plays a crucial role in mitigating the effect of device self-heating. The outcomes of this study suggest that high thermal conductivity passive elastic layers can be used as an effective thermal management solution for PZT-based MEMS actuators. 

When utilizing double-beam laser interferometry to assess the piezoelectric coefficient of a film on a substrate, probing both top and bottom sample surfaces is expected to correct the erroneous bending contribution by canceling the additional path length from the sample height change. However, when the bending deformation becomes extensive and uncontrolled, as in the case of membranes or fully released piezoelectric films, the double-beam setup can no longer account for the artifacts, thus resulting in inflated film displacement data and implausibly large piezoelectric coefficient values. This work serves to identify these challenges by demonstrating d33,f measurements of fully released PZT films using a commercial double-beam laser interferometer. For a 1 μm thick randomly oriented PZT film on a 10 μm thick polyimide substrate, a large apparent d33,f of 9500 pm/V was measured. The source of error was presumably a distorted interference pattern due to the erroneous phase shift of the measurement laser beam caused by extensive deformation of the released sample structure. This effect has unfortunately been mistaken as enhanced piezoelectric responses by some reports in the literature. Finite element models demonstrate that bending, laser beam alignment, and the offset between the support structure and the electrode under test have a strong influence on the apparent film d33,f.