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Abstract Emerging non-volatile memristor-based devices with resistive switching (RS) materials are being widely researched as promising contenders for the next generation of data storage and neuromorphic technologies. Titanium nitride (TiN_x) is a common industry-friendly electrode system for RS; however, the precise TiN_xproperties required for optimum RS performance is still lacking. Herein, using ion-assisted DC magnetron sputtering, we demonstrate the key importance not only of engineering the TiN_xbottom electrodes to be dense, smooth, and conductive, but also understoichiometric in N. With these properties, RS in HfO₂-based memristive devices is shown to be optimised for TiN_0.96. These devices have switching voltages ≤ ±1 V with promising device-to-device uniformity, endurance, memory window of ~40, and multiple non-volatile intermediate conductance levels. This study highlights the importance of precise tuning of TiN_xbottom electrodes to achieve robust performance of oxide resistive switching materials. 

A “lab‐to‐fab” transition is described that enables the semiautomated production of thin‐film potentiometric pH electrodes, designed for use in sterile single‐use bioreactors. Manual methods of materials deposition and film casting are replaced with spray coating on a moving web and the production of membranes with a programmable dispenser operating at constant rates. These provide a greater degree of control over membrane thickness and a reduction in voltage spread between electrodes, which are evaluated in batches using a multichannel analyzer. γ‐ray ionization of the pH electrodes introduces a predictable voltage drift that follows a log decay function on the day timescale; the voltage decay rate correlates with membrane thickness and can be modeled as a parallel diode–capacitor circuit. Batches of radiation‐sterilized pH electrodes are tested in cell culture media and yield mean pH values within 0.05 units relative to a commercial meter (ground truth) following a single‐point calibration protocol. Quantitative uncertainty analysis attributes more than half of total error to variations caused by ionizing radiation and yields novel insights into strategies for reducing uncertainty. 

Abstract Vertically aligned nanocomposite (VAN) thin films offer exceptional physical properties through diverse material combinations, providing a robust platform for designing complex nanocomposites with tailored performance. Considering materials compatibility issues, most of oxide‐metal VANs have focused on noble metals as the secondary phase in the oxide matrix. Here, an oxide‐metal hybrid metamaterials in the VAN form has been designed which combines ferroelectric BaTiO₃(BTO) with two immiscible non‐noble metal elements of Co and Cu, resulting in a three‐phase BTO‐Co‐Cu (BTO‐CC) VAN film. This film exhibits a characteristic nanopillar‐in‐matrix nanostructure with three distinct types of nanopillar morphologies, i.e., Co‐rich cylindrical nanopillars, Cu‐Co‐nanolaminated Co rectangular nanopillars and Co‐Cu‐core–shell cylindrical nanopillars. Phase field modeling indicates the constructed structure is resulted from the interplay between thermochemical, chemomechanical, and interfacial energy driving forces. The strong structural anisotropy leads to anisotropic optical and magnetic properties, presenting potential as hyperbolic metamaterial (HMM) with transverse‐positive dispersion in the near‐infrared region. The inclusion of non‐noble Cu nanostructure induces surface plasmon resonance (SPR) in the visible region. Additionally, ferroelectric properties have been demonstrated in a BTO/BTO‐CC bilayer, confirming room‐temperature multiferroicity in the film. The complex three‐phase VANs offer a novel platform for exploring electro‐magneto‐optical coupling along vertical interfaces toward future integrated devices. 

Abstract The demonstration of epitaxial thin film transfer has enormous potential for thin film devices free from the traditional substrate epitaxy limitations. However, large‐area continuous film transfer remains a challenge for the commonly reported polymer‐based transfer methods due to bending and cracking during transfer, especially for highly strained epitaxial thin films. In this work, a new epoxy‐based, rigid transfer method is used to transfer films from an SrTiO₃(STO) growth substrate onto various new substrates, including those that will typically pose significant problems for epitaxy. An epitaxial multiferroic Bi₃Fe₂Mn₂O_x(BFMO) layered supercell (LSC) material is selected as the thin film for this demonstration. The results of surface and structure studies show an order of magnitude increase in the continuous area of transferred films when compared to previous transfer methods. The magnetic properties of the BFMO LSC films are shown to be enhanced by the release of strain in this method, and ferromagnetic resonance is found with an exceptionally low Gilbert damping coefficient. The large‐area transfer of this highly strained complex oxide BFMO thin film presents enormous potential for the integration of many other multifunctional oxides onto new substrates for future magnetic sensors and memory devices. 

The integration of nanocomposite thin films with combined multifunctionalities on flexible substrates is desired for flexible device design and applications. For example, combined plasmonic and magnetic properties could lead to unique optical switchable magnetic devices and sensors. In this work, a multiphase TiN-Au-Ni nanocomposite system with core–shell-like Au-Ni nanopillars embedded in a TiN matrix has been demonstrated on flexible mica substrates. The three-phase nanocomposite film has been compared with its single metal nanocomposite counterparts, i.e., TiN-Au and TiN-Ni. Magnetic measurement results suggest that both TiN-Au-Ni/mica and TiN-Ni/mica present room-temperature ferromagnetic property. Tunable plasmonic property has been achieved by varying the metallic component of the nanocomposite films. The cyclic bending test was performed to verify the property reliability of the flexible nanocomposite thin films upon bending. This work opens a new path for integrating complex nitride-based nanocomposite designs on mica towards multifunctional flexible nanodevice applications. 

Abstract Complex oxide thin films cover a range of physical properties and multifunctionalities that are critical for logic, memory, and optical devices. Typically, the high‐quality epitaxial growth of these complex oxide thin films requires single crystalline oxide substrates such as SrTiO₃(STO), MgO, LaAlO₃, a‐Al₂O_3,and many others. Recent successes in transferring these complex oxides as free‐standing films not only offer great opportunities in integrating complex oxides on other devices, but also present enormous opportunities in recycling the deposited substrates after transfer for cost‐effective and sustainable processing of complex oxide thin films. In this work, the surface modification effects introduced on the recycled STO are investigated, and their impacts on the microstructure and properties of subsequently grown epitaxial oxide thin films are assessed and compared with those grown on the pristine substrates. Detailed analyses using high‐resolution scanning transmission electron microscopy and geometric phase analysis demonstrate distinct strain states on the surfaces of the recycled STO versus the pristine substrates, suggesting a pre‐strain state in the recycled STO substrates due to the previous deposition layer. These findings offer opportunities in growing highly mismatched oxide films on the recycled STO substrates with enhanced physical properties. Specifically, yttrium iron garnet (Y₃Fe₅O₁₂) films grown on recycled STO present different ferromagnetic responses compared to that on the pristine substrates, underscoring the effects of surface modification. The study demonstrates the feasibility of reuse and redeposition using recycled substrates. Via careful handling and preparation, high‐quality epitaxial thin films can be grown on recycled substrates with comparable or even better structural and physical properties toward sustainable process of complex oxide devices. 

Abstract Flexible and wearable sensors show enormous potential for personalized healthcare devices by real‐time monitoring of an individual's health. Typically, a single functional material is selected for one sensor to sense a particular physical signal while multiple materials will be selected for multi‐mode sensing. Vertically aligned nanocomposites (VANs) have recently demonstrated various material combinations and novel coupled multifunctionalities that are hard to achieve in any single‐phase material alone, including multiphase multiferroics, magneto‐optic coupling, and strong magnetic and optical anisotropy. Integrating these novel VANs into wearable sensors shows enormous potential in multi‐mode sensing owing to their multifunctional nature. In this work, the transfer of VANs onto polydimethylsiloxane as a novel flexible chemical and pressure sensor is demonstrated. For this demonstration, the classical BaTiO₃‐Au VAN with combined plasmonic and piezoelectric properties is used to demonstrate a multi‐sensing mechanism. A thin water‐soluble buffer of Sr₃Al₂O₆serves as a buffer layer for the epitaxial growth and transfer process. The electrical output based on the piezoelectric responses and identifying 4‐mercaptobenzoic acid by surface‐enhanced Raman spectroscopy reveal great potential for free‐standing VANs in a wearable multifunctional sensing platform.