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Modal analysis on micro-vortex generator (MVG)-controlled supersonic flow at different Mach numbers is performed in this paper. The purpose of this investigation is to clarify the different properties of streamwise and ring-like vortical modes, and the effects of different Mach numbers on these modes, to further understand the vortical structures as they travel from MVG down to the shock wave/boundary-layer interaction (SWBLI) region. To this end, a high order and high resolution large eddy simulation (LES) was carried out, which identified the vortical structures behind the MVG and in the shock wave/boundary-layer interaction (SWBLI) region in the supersonic ramp flow with flow speeds of three different Mach numbers 1.5, 2.0, and 2.5. The proper orthogonal decomposition (POD) then was adopted to investigate the modes of the fluctuation flow field. It emerged that the streamwise and ring-like vortical modes were disparate in energy distribution, structural order, frequency and amplitude. Furthermore, it showed that as the Mach number increased, the energy of the streamwise modes increased while the opposite was true for ring-like modes; and the streamwise modal structures were altered more significantly than the ring-like modes, and the frequency of each mode scarcely varied. It was also found that the streamwise vortices absorbed energy from the ring-like vortices while they traveled from the MVG down to the SWBLI region, but the dominant frequency of each mode rarely changed during this process.